Hydrogen Sulfide H2S 3.6-40 ppm MIDAS-E-H2S

Methane (%LEL) CH4 6.5-99% LEL MIDAS-E-LEL*

Methyl Fluoride CH3F 8-120 ppm MIDAS-E-XHF

Nitric Oxide NO 9-100 ppm MIDAS-E-NOX

Nitrogen Dioxide NO2 1.05-12 ppm MIDAS-E-NO2

Nitrogen Trifluoride NF3 3.6-40 ppm MIDAS-E-HFX for 00P, XHF for NP1

Octofluorocyclopentene C5F8 3-40 ppm MIDAS-E-XCF

Oxygen O2 0.2-25% v/v MIDAS-E-O2X

Ozone O3 0.065-0.7 ppm MIDAS-E-O3H

Ozone (Low Level) O3 0.036-0.4 ppm MIDAS-E-O3X

Phosphine PH3 110-1200 ppb MIDAS-E-PH3

Silane