Hydrogen Sulfide H2S 3.6-40 ppm MIDAS-E-H2S
Methane (%LEL) CH4 6.5-99% LEL MIDAS-E-LEL*
Methyl Fluoride CH3F 8-120 ppm MIDAS-E-XHF
Nitric Oxide NO 9-100 ppm MIDAS-E-NOX
Nitrogen Dioxide NO2 1.05-12 ppm MIDAS-E-NO2
Nitrogen Trifluoride NF3 3.6-40 ppm MIDAS-E-HFX for 00P, XHF for NP1
Octofluorocyclopentene C5F8 3-40 ppm MIDAS-E-XCF
Oxygen O2 0.2-25% v/v MIDAS-E-O2X
Ozone O3 0.065-0.7 ppm MIDAS-E-O3H
Ozone (Low Level) O3 0.036-0.4 ppm MIDAS-E-O3X
Phosphine PH3 110-1200 ppb MIDAS-E-PH3
Silane
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